Fine feature fidelity of Jet and Flash™ Imprint Lithography (J-FIL™) is influenced by many solidified phase resist characteristics including specifically preferential adhesion ratio. To increase preferential adhesion ratio for a given set of release technology, an adhesion layer or prime layer needs to be applied to the substrate. The adhesion layer needs to be thin (e.g. 1-2nm), and typically deposited onto substrate as a liquid via spin coating (TranSpin) or as a vapor (ValMat). While spin coating is possible on most substrates, ValMat is preferred for patterned media because they are patterned on both sides and the hole in the center makes spin coating difficult.
