A key requirement for HDD media technology is double sided recording. This enables drive manufacturers to maximize the storage of the device without adding additional platters which is both costly and takes up space. This additional challenge to imprint lithography is met by the Imprio HD2200 – a fully automated UV-nanoimprint lithography tool that has been specifically designed for patterned media applications. J-FIL’s low pressure technique allows for no backside contact imprinting, a requirement for double sided patterning. Figure One shows a double-sided disk imprint with an inner diameter of 20mm and an outer diameter of 65mm; the patterned area covers the surface in the radial span of 13.5 to 30.5mm. This disk was imprinted using a test template with DTR line/space patterns at a track pitch of 120nm, with corresponding servo patterns.
Figure One - Photograph of Disk Side “A” (left photo) and Disk Side “B” (right photo) as taken from the Imprio HD2200 camera system. The same template was used to imprint both disks.
Introduction 
Residual Layer Thickness Double-Sided Patterning
