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Molecular
Imprints achieves fine alignment because the wafer and template (imprint mask)
are less than 250 nanometers apart and in lubricated contact,
which enables fine adjusting of the wafer and template.
The S-FIL® imprint mask and substrate
are in liquid contact due to the low viscosity imprint
solution, which also behaves as a lubricant. MII is confident
that it can demonstrate alignment capabilities that rival
conventional state-of-the-art lithography systems. |