Enabling Nano-Scale Technology in Manufacturing
Capabilities

S-FIL® technology is insensitive to pattern density. Because the low viscosity imprint material is precisely dispensed in droplets for each field, step and flash imprint lithography can simultaneously pattern both dense and sparse features onto the substrate during the same imprint step.

Dense 1-micron Features
Sparse 20-micron Features

Courtesy of the University of Texas

Copyright 2008